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Tohru Segawa
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Koriyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Production process of synthetic quartz glass
Patent number
7,841,211
Issue date
Nov 30, 2010
Shin-Etsu Quartz Products Co., Ltd.
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Quartz glass jig for processing apparatus using plasma
Patent number
6,869,898
Issue date
Mar 22, 2005
Heraeus Quarzglas GmbH & Co. KG
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Plasma resistant quartz glass jig
Patent number
6,680,455
Issue date
Jan 20, 2004
Heraeus Quarzglas GmbH & Co. KG
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Method of producing cristobalite containing silica glass
Patent number
5,876,473
Issue date
Mar 2, 1999
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Patents Applications
last 30 patents
Information
Patent Application
Method for producing synthetic quartz glass and synthetic quartz gl...
Publication number
20060059948
Publication date
Mar 23, 2006
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
Silica glass jig for semiconductor industry and method for producin...
Publication number
20040050102
Publication date
Mar 18, 2004
Tohru Segawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Quartz glass jig for processing apparatus using plasma
Publication number
20030190483
Publication date
Oct 9, 2003
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
Silica glass jig for semiconductor industry and method for producin...
Publication number
20020078886
Publication date
Jun 27, 2002
Tohru Segawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma resistant quartz glass jig
Publication number
20020046992
Publication date
Apr 25, 2002
Kyoichi Inaki
C03 - GLASS MINERAL OR SLAG WOOL