Tohru Suzuki

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Patterning method, lithography apparatus, and article manufacturing...
- Patent number 10,466,602
- Issue date Nov 5, 2019
- Canon Kabushiki Kaisha
- Taichi Yoshioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MARK DETECTING APPARATUS, MARK LEARNING APPARATUS, SUBSTRATE PROCES...
- Publication number 20220365454
- Publication date Nov 17, 2022
- Canon Kabushiki Kaisha
- Masashi Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20190072864
- Publication date Mar 7, 2019
- Canon Kabushiki Kaisha
- Taichi Yoshioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY