Tohru Watari

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for substrate processing
- Patent number 7,467,635
- Issue date Dec 23, 2008
- Sprout Co., Ltd.
- Joya Satoshi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for substrate processing
- Publication number 20040226582
- Publication date Nov 18, 2004
- Joya Satoshi
- B08 - CLEANING
Information Patent Application
Apparatus and method for substrate processing
- Publication number 20040065354
- Publication date Apr 8, 2004
- Tadashi Ishizaki
- B08 - CLEANING
Information Patent Application
Substrate processing system and method
- Publication number 20030191551
- Publication date Oct 9, 2003
- Hideto Gotoh
- H01 - BASIC ELECTRIC ELEMENTS