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Tokuhisa OOIWA
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Kanagawa-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,111,313
Issue date
Oct 23, 2018
Shibaura Mechatronics Corporation
Takeharu Motokawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20130256270
Publication date
Oct 3, 2013
Kabushiki Kaisha Toshiba
Takeharu MOTOKAWA
H01 - BASIC ELECTRIC ELEMENTS