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Tokuji Takahashi
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Hachioji, JP
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last 30 patents
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Patent Grant
Apparatus and method for measuring thickness of thin semiconductor...
Patent number
5,587,792
Issue date
Dec 24, 1996
Seiji Nishizawa
G01 - MEASURING TESTING
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Patent Grant
Method and apparatus for measuring the thicknesses of layers of a m...
Patent number
5,523,840
Issue date
Jun 4, 1996
Mitsubishi Denki Kabushiki Kaisha
Seiji Nishizawa
G01 - MEASURING TESTING
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Patent Grant
Optical apparatus components having spectrally overlapping characte...
Patent number
5,371,596
Issue date
Dec 6, 1994
Jasco Corporation
Ryo Hattori
G01 - MEASURING TESTING