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Tokunobu Akao
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing device, substrate conveying device, and substr...
Patent number
6,742,977
Issue date
Jun 1, 2004
Kokusai Electric Co., Ltd.
Satohiro Okayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate carrying apparatus
Patent number
5,957,651
Issue date
Sep 28, 1999
Kokusai Electric Co., Ltd.
Yuji Takebayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate heating equipment for use in a semiconductor fabricating...
Patent number
5,850,071
Issue date
Dec 15, 1998
Kokusai Electric Co., Ltd.
Issei Makiguchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Substrate processing apparatus and semiconductor manufacturing method
Publication number
20010035124
Publication date
Nov 1, 2001
Satohiro Okayama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...