Tokushige Katsuhiko

Person

  • Tokyo, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

    • Publication number 20180056470
    • Publication date Mar 1, 2018
    • EBARA CORPORATION
    • Masayoshi IMAI
    • C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
  • Information Patent Application

    Polishing apparatus

    • Publication number 20060194521
    • Publication date Aug 31, 2006
    • Kenji Kamimura
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Polishing apparatus

    • Publication number 20050191949
    • Publication date Sep 1, 2005
    • Kenji Kamimura
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Substrate processing method and apparatus

    • Publication number 20050191858
    • Publication date Sep 1, 2005
    • Akira Fukunaga
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Substrate processing method and apparatus

    • Publication number 20040241985
    • Publication date Dec 2, 2004
    • Koji Mishima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Polishing method and apparatus

    • Publication number 20040087258
    • Publication date May 6, 2004
    • Norio Kimura
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Polishing apparatus

    • Publication number 20020164932
    • Publication date Nov 7, 2002
    • Kenji Kamimura
    • B24 - GRINDING POLISHING