Tokutarou Hayashi

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,074,048
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Hiroki Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, substrate transfer method and recording...
- Patent number 10,879,100
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Tokutarou Hayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and non-tr...
- Patent number 10,256,127
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Tokutarou Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and non-tr...
- Patent number 9,507,349
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Tokutarou Hayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thermal processing apparatus for thermal processing substrate and p...
- Patent number 9,299,599
- Issue date Mar 29, 2016
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,268,327
- Issue date Feb 23, 2016
- Tokyo Electron Limited
- Akihiro Teramoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transport method, substrate transport apparatus, and coat...
- Patent number 9,240,337
- Issue date Jan 19, 2016
- Tokyo Electron Limited
- Tokutarou Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 9,136,150
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrying mechanism, substrate carrying method and recordi...
- Patent number 8,781,787
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder positioning method and substrate processing system
- Patent number 8,755,935
- Issue date Jun 17, 2014
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate placing position adjusting m...
- Patent number 8,433,436
- Issue date Apr 30, 2013
- Tokyo Electron Limited
- Yuichi Doki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system, substrate placing position adjusting m...
- Patent number 8,055,376
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Yuichi Doki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of adjusting moving position of transfer arm and position de...
- Patent number 7,884,622
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Yuichi Doki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
BONDING APPARATUS AND BONDING METHOD
- Publication number 20230086738
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210384058
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Hiroki HARADA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD AND RECORDING...
- Publication number 20180240695
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...
- Publication number 20170018444
- Publication date Jan 19, 2017
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus for thermal processing substrate and p...
- Publication number 20140234991
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130211571
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Akihiro TERAMOTO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...
- Publication number 20130204421
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20130202388
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT METHOD, SUBSTRATE TRANSPORT APPARATUS, AND COAT...
- Publication number 20120257176
- Publication date Oct 11, 2012
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20120224945
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...
- Publication number 20120072005
- Publication date Mar 22, 2012
- TOKYO ELECTRON LIMITED
- Yuichi DOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRYING MECHANISM, SUBSTRATE CARRYING METHOD AND RECORDI...
- Publication number 20120046904
- Publication date Feb 23, 2012
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ADJUSTING MOVING POSITION OF TRANSFER ARM AND POSITION DE...
- Publication number 20090051370
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Doki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...
- Publication number 20080102200
- Publication date May 1, 2008
- TOKYO ELECTRON LIMITED
- Yuichi DOKI
- H01 - BASIC ELECTRIC ELEMENTS

Tokutarou Hayashi

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate transfer device, substrate transfer method and recording...

Substrate transfer apparatus, substrate transfer method, and non-tr...

Substrate transfer apparatus, substrate transfer method, and non-tr...

Thermal processing apparatus for thermal processing substrate and p...

Substrate processing apparatus and substrate processing method

Substrate transport method, substrate transport apparatus, and coat...

Substrate processing apparatus, substrate processing method and non...

Substrate carrying mechanism, substrate carrying method and recordi...

Substrate holder positioning method and substrate processing system

Substrate processing system, substrate placing position adjusting m...

Substrate processing system, substrate placing position adjusting m...

Method of adjusting moving position of transfer arm and position de...

Patents Applicationslast 30 patents

BONDING APPARATUS AND BONDING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD AND RECORDING...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...

Thermal processing apparatus for thermal processing substrate and p...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

SUBSTRATE TRANSPORT METHOD, SUBSTRATE TRANSPORT APPARATUS, AND COAT...

SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...

SUBSTRATE CARRYING MECHANISM, SUBSTRATE CARRYING METHOD AND RECORDI...

METHOD OF ADJUSTING MOVING POSITION OF TRANSFER ARM AND POSITION DE...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING M...