TREA

Tolga Ergin

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  • Ditzingen, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    EUV light source with a beam positioning device
    • Patent number 12,171,054
    • Issue date Dec 17, 2024
    • TRUMPF Lasersystems for Semiconductor Manufacturing SE
    • Martin Lambert
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Laser focussing module
    • Patent number 12,007,693
    • Issue date Jun 11, 2024
    • ASML Netherlands B.V.
    • Ruud Antonius Catharina Maria Beerens
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Focusing device and EUV radiation generating device having same
    • Patent number 11,835,699
    • Issue date Dec 5, 2023
    • TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    • Martin Lambert
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Reflective optical element, beam guiding device and EUV-beam genera...
    • Patent number 11,675,202
    • Issue date Jun 13, 2023
    • TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    • Martin Lambert
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Polarizer
    • Patent number 11,304,286
    • Issue date Apr 12, 2022
    • TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    • Tolga Ergin
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Adjusting a beam diameter and an aperture angle of a laser beam
    • Patent number 10,327,318
    • Issue date Jun 18, 2019
    • TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    • Martin Lambert
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents