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Tolga Erguder
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Fort Collins, CO, US
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last 30 patents
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Patent Grant
Adaptive controller for ion source
Patent number
7,853,364
Issue date
Dec 14, 2010
Veeco Instruments, Inc.
James D. Deakins
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ADAPTIVE CONTROLLER FOR ION SOURCE
Publication number
20080129209
Publication date
Jun 5, 2008
Veeco Instruments, Inc.
James D. Deakins
H01 - BASIC ELECTRIC ELEMENTS