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Tom Kane
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Santa Cruz, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Chemical vapor deposition system
Patent number
6,485,783
Issue date
Nov 26, 2002
ASML US, Inc.
Robert J. Bailey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Chemical vapor deposition system and method
Patent number
6,206,973
Issue date
Mar 27, 2001
Silicon Valley Group Thermal System LLC
Robert J. Bailey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Heated vacuum support apparatus
Publication number
20030121898
Publication date
Jul 3, 2003
Tom Kane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...