Tom Kirschenheiter

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reactor system and method to reduce residue buildup during a film d...
- Patent number 12,043,899
- Issue date Jul 23, 2024
- ASM IP Holding B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Three-color 3D DRAM stack and methods of making
- Patent number 11,764,058
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Arvind Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor with sidewall humps for uniform deposition
- Patent number 11,594,444
- Issue date Feb 28, 2023
- ASM IP Holding, B.V.
- Matthew Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor system and method to reduce residue buildup during a film d...
- Patent number 11,390,950
- Issue date Jul 19, 2022
- ASM IP Holding B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution system, reactor including the system, and methods...
- Patent number 10,604,847
- Issue date Mar 31, 2020
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution system, reactor including the system, and methods...
- Patent number 10,167,557
- Issue date Jan 1, 2019
- ASM IP Holding B.V.
- Mark Hawkins
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
EPITAXIAL GROWTH OF STRAINED Si/SiGe SUPERLATTICE
- Publication number 20250037997
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ruiying HAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED STRAIN AND STOP LAYER FOR Si/SiGe EPI STACKS
- Publication number 20240429048
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Ruiying HAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITA...
- Publication number 20240247405
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Alexandros ANASTASOPOULOS
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE MODIFICATION FOR SUPERLATTICE CRITICAL THICKNESS IMPROVEMENT
- Publication number 20240038531
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Thomas KIRSCHENHEITER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
- Publication number 20240018658
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...
- Publication number 20230326925
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Andrew Anthony Cockburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-COLOR 3D DRAM STACK AND METHODS OF MAKING
- Publication number 20230102558
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Arvind Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMATION OF A SIGE/SI SUPERLATTICE
- Publication number 20230029344
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- John TOLLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED STRAIN Si/SiGe HETEROEPITAXY STACKS FOR 3D DRAM
- Publication number 20230012819
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- John Byron Tolle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...
- Publication number 20220307139
- Publication date Sep 29, 2022
- ASM IP HOLDING B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR WITH SIDEWALL HUMPS FOR UNIFORM DEPOSITION
- Publication number 20210225688
- Publication date Jul 22, 2021
- ASM IP HOLDING B.V.
- Matthew Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION SYSTEM, REACTOR INCLUDING THE SYSTEM, AND METHODS...
- Publication number 20190106788
- Publication date Apr 11, 2019
- ASM IP HOLDING B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...
- Publication number 20180195174
- Publication date Jul 12, 2018
- ASM IP HOLDING B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION SYSTEM, REACTOR INCLUDING THE SYSTEM, AND METHODS...
- Publication number 20150267299
- Publication date Sep 24, 2015
- ASM IP HOLDING B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tom Kirschenheiter

Person

Patents Grantslast 30 patents

Reactor system and method to reduce residue buildup during a film d...

Three-color 3D DRAM stack and methods of making

Susceptor with sidewall humps for uniform deposition

Reactor system and method to reduce residue buildup during a film d...

Gas distribution system, reactor including the system, and methods...

Gas distribution system, reactor including the system, and methods...

Patents Applicationslast 30 patents

EPITAXIAL GROWTH OF STRAINED Si/SiGe SUPERLATTICE

REDUCED STRAIN AND STOP LAYER FOR Si/SiGe EPI STACKS

METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITA...

SUBSTRATE MODIFICATION FOR SUPERLATTICE CRITICAL THICKNESS IMPROVEMENT

FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...

MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...

THREE-COLOR 3D DRAM STACK AND METHODS OF MAKING

METHODS OF FORMATION OF A SIGE/SI SUPERLATTICE

REDUCED STRAIN Si/SiGe HETEROEPITAXY STACKS FOR 3D DRAM

REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...

SUSCEPTOR WITH SIDEWALL HUMPS FOR UNIFORM DEPOSITION

GAS DISTRIBUTION SYSTEM, REACTOR INCLUDING THE SYSTEM, AND METHODS...

REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...

GAS DISTRIBUTION SYSTEM, REACTOR INCLUDING THE SYSTEM, AND METHODS...