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Tom Ni
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Fremont, CA, US
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last 30 patents
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Patent Grant
Plasma confinement apparatus, and method for confining a plasma
Patent number
8,608,851
Issue date
Dec 17, 2013
Advanced Micro-Fabrication Equipment, Inc. Asia
Tom Ni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for detecting planarization of metal films pri...
Patent number
7,690,966
Issue date
Apr 6, 2010
Lam Research Corporation
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for detecting planarization of metal films pri...
Patent number
7,413,988
Issue date
Aug 19, 2008
Lam Research Corporation
Ramesh Gopalan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for improving etch and deposition uniformity i...
Patent number
6,042,687
Issue date
Mar 28, 2000
Lam Research Corporation
Vikram Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas injection system for plasma processing
Patent number
6,013,155
Issue date
Jan 11, 2000
Lam Research Corporation
Brian McMillin
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
PLASMA CONFINEMENT APPARATUS, AND METHOD FOR CONFINING A PLASMA
Publication number
20140103805
Publication date
Apr 17, 2014
ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Tom Ni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma confinement apparatus, and method for confining a plasma
Publication number
20070085483
Publication date
Apr 19, 2007
Advanced Micro-Fabrication Equipment, Inc. Asia
Tom Ni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...