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Tom Sterken
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Gent, BE
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Patents Grants
last 30 patents
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Patent Grant
Method for forming MEMS variable capacitors
Patent number
8,658,512
Issue date
Feb 25, 2014
IMEC
Tom Sterken
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for Forming MEMS Variable Capacitors
Publication number
20120171836
Publication date
Jul 5, 2012
IMEC
Tom Sterken
H01 - BASIC ELECTRIC ELEMENTS