Tom Stevenson

Person

Morgan Hill, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
- Patent number 9,899,228
- Issue date Feb 20, 2018
- Lam Research Corporation
- Tom Stevenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating system and method for coating interior fluid wetted surface...
- Patent number 9,873,940
- Issue date Jan 23, 2018
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
- Patent number 9,546,432
- Issue date Jan 17, 2017
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
- Patent number 9,123,651
- Issue date Sep 1, 2015
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film adhesive for semiconductor vacuum processing apparatus
- Patent number 9,028,646
- Issue date May 12, 2015
- Lam Research Corporation
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Grant
Pressure controlled heat pipe temperature control plate
- Patent number 8,975,817
- Issue date Mar 10, 2015
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for stabilizing contact surfaces of electrostatic chucks
- Patent number 8,906,164
- Issue date Dec 9, 2014
- Lam Research Corporation
- Chris Kimball
- B08 - CLEANING
Information Patent Grant
Composite showerhead electrode assembly for a plasma processing app...
- Patent number 8,701,268
- Issue date Apr 22, 2014
- Lam Research Corporation
- Dean Jay Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
- Patent number 8,679,288
- Issue date Mar 25, 2014
- Lam Research Corporation
- Tom Stevenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing chamber component having adaptive thermal conductor
- Patent number 8,529,729
- Issue date Sep 10, 2013
- Lam Research Corporation
- Tom Stevenson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Film adhesive for semiconductor vacuum processing apparatus
- Patent number 8,449,786
- Issue date May 28, 2013
- Lam Research Corporation
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Grant
Composite showerhead electrode assembly for a plasma processing app...
- Patent number 8,418,649
- Issue date Apr 16, 2013
- Lam Research Corporation
- Dean Jay Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
- Patent number 8,313,665
- Issue date Nov 20, 2012
- Lam Research Corporation
- Thomas R. Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
- Patent number 7,862,682
- Issue date Jan 4, 2011
- Lam Research Corporation
- Thomas R. Stevenson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...
- Publication number 20180127868
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Lin XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING CERAMIC PARTS IN HOT ISOSTATIC PRE...
- Publication number 20180065274
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- William CHARLES
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
USE OF PLASMA-RESISTANT ATOMIC LAYER DEPOSITION COATINGS TO EXTEND...
- Publication number 20160379806
- Publication date Dec 29, 2016
- LAM RESEARCH CORPORATION
- Lin XU
- B32 - LAYERED PRODUCTS
Information Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
- Publication number 20150337450
- Publication date Nov 26, 2015
- LAM RESEARCH CORPORATION
- Hong SHIH
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALL...
- Publication number 20150187615
- Publication date Jul 2, 2015
- LAM RESEARCH CORPORATION
- John Daugherty
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...
- Publication number 20150184296
- Publication date Jul 2, 2015
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...
- Publication number 20140295670
- Publication date Oct 2, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES
- Publication number 20140154888
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Tom Stevenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSURE CONTROLLED HEAT PIPE TEMPERATURE CONTROL PLATE
- Publication number 20140103806
- Publication date Apr 17, 2014
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS
- Publication number 20130292048
- Publication date Nov 7, 2013
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Application
COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...
- Publication number 20130244441
- Publication date Sep 19, 2013
- LAM RESEARCH CORPORATION
- Dean Jay Larson
- B32 - LAYERED PRODUCTS
Information Patent Application
COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RES...
- Publication number 20130102156
- Publication date Apr 25, 2013
- LAM RESEARCH CORPORATION
- Tom Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods For Stabilizing Contact Surfaces of Electrostatic Chucks
- Publication number 20120031427
- Publication date Feb 9, 2012
- LAM RESEARCH CORPORATION
- Chris Kimball
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING CHAMBER COMPONENT HAVING ADAPTIVE THERMAL CONDUCTOR
- Publication number 20110300714
- Publication date Dec 8, 2011
- LAM RESEARCH CORPORATION
- Tom Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES
- Publication number 20110081783
- Publication date Apr 7, 2011
- LAM RESEARCH CORPORATION
- Thomas R. Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT-UP PREVENTION IN ELECTROSTATIC CHUCKS
- Publication number 20110024049
- Publication date Feb 3, 2011
- LAM RESEARCH CORPORATION
- Tom Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS
- Publication number 20100304571
- Publication date Dec 2, 2010
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Application
Showerhead electrode assemblies for plasma processing apparatuses
- Publication number 20090305509
- Publication date Dec 10, 2009
- LAM RESEARCH CORPORATION
- Tom Stevenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...
- Publication number 20090163034
- Publication date Jun 25, 2009
- LAM RESEARCH CORPORATION
- DEAN JAY LARSON
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Showerhead electrode assemblies for plasma processing apparatuses
- Publication number 20080308228
- Publication date Dec 18, 2008
- LAM RESEARCH CORPORATION
- Thomas R. Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Very long cylindrical sputtering target and method for manufacturing
- Publication number 20070074969
- Publication date Apr 5, 2007
- Wayne R. Simpson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Large area elastomer bonded sputtering target and method for manufa...
- Publication number 20060272941
- Publication date Dec 7, 2006
- Wayne R. Simpson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tom Stevenson

Person

Patents Grantslast 30 patents

Showerhead electrode assemblies for plasma processing apparatuses

Coating system and method for coating interior fluid wetted surface...

Dense oxide coated component of a plasma processing chamber and met...

Dense oxide coated component of a plasma processing chamber and met...

Film adhesive for semiconductor vacuum processing apparatus

Pressure controlled heat pipe temperature control plate

Methods for stabilizing contact surfaces of electrostatic chucks

Composite showerhead electrode assembly for a plasma processing app...

Showerhead electrode assemblies for plasma processing apparatuses

Plasma processing chamber component having adaptive thermal conductor

Film adhesive for semiconductor vacuum processing apparatus

Composite showerhead electrode assembly for a plasma processing app...

Showerhead electrode assemblies for plasma processing apparatuses

Showerhead electrode assemblies for plasma processing apparatuses

Patents Applicationslast 30 patents

COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...

METHOD AND APPARATUS FOR FORMING CERAMIC PARTS IN HOT ISOSTATIC PRE...

USE OF PLASMA-RESISTANT ATOMIC LAYER DEPOSITION COATINGS TO EXTEND...

DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...

COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALL...

COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACE...

DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND MET...

SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES

PRESSURE CONTROLLED HEAT PIPE TEMPERATURE CONTROL PLATE

FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS

COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...

COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RES...

Methods For Stabilizing Contact Surfaces of Electrostatic Chucks

PLASMA PROCESSING CHAMBER COMPONENT HAVING ADAPTIVE THERMAL CONDUCTOR

SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES

LIGHT-UP PREVENTION IN ELECTROSTATIC CHUCKS

FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS

Showerhead electrode assemblies for plasma processing apparatuses

COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...

Showerhead electrode assemblies for plasma processing apparatuses

Very long cylindrical sputtering target and method for manufacturing

Large area elastomer bonded sputtering target and method for manufa...