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Tomiho Yamada
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Ohbu, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing cloth and method of manufacturing semiconductor device
Patent number
7,884,020
Issue date
Feb 8, 2011
Kabushiki Kaisha Toshiba
Hideaki Hirabayashi
B24 - GRINDING POLISHING
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Patent Grant
Polishing cloth and method of manufacturing semiconductor device
Patent number
7,291,188
Issue date
Nov 6, 2007
Kabushiki Kaisha Toshiba
Hideaki Hirabayashi
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING CLOTH AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20080032504
Publication date
Feb 7, 2008
Hideaki Hirabayashi
B24 - GRINDING POLISHING
Information
Patent Application
Polishing cloth and method of manufacturing semiconductor device
Publication number
20050148185
Publication date
Jul 7, 2005
Hideaki Hirabayashi
B24 - GRINDING POLISHING