Tomiko Kamada

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method
- Patent number 9,412,607
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer film etching method and plasma processing apparatus
- Patent number 9,373,520
- Issue date Jun 21, 2016
- Tokyo Electron Limited
- Shota Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 9,305,795
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTILAYER FILM ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150140822
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Shota YOSHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20150064926
- Publication date Mar 5, 2015
- TOKYO ELECTRON LIMITED
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20140332372
- Publication date Nov 13, 2014
- TOKYO ELECTRON LIMITED
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVAPORATING APPARATUS AND EVAPORATING METHOD
- Publication number 20130209666
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Tomiko Kamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...