Tominori Yoshida

Person

  • Phoenix, AZ, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Low-k dielectric materials and processes

    • Patent number 6,905,981
    • Issue date Jun 14, 2005
    • ASM Japan K.K.
    • Michael A. Todd
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...