Tomio Fukushima

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Fujiidera-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Double side polishing method and apparatus
- Patent number 8,002,610
- Issue date Aug 23, 2011
- Sumitomo Mitsubishi Silicon Corporation
- Akira Horiguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Double side polishing method and apparatus
- Patent number 7,648,409
- Issue date Jan 19, 2010
- Sumitomo Mitsubishi Silicon Corporation
- Akira Horiguchi
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
DOUBLE SIDE POLISHING METHOD AND APPARATUS
- Publication number 20100130111
- Publication date May 27, 2010
- Akira Horiguchi
- B24 - GRINDING POLISHING