Tomiyasu Maezono

Follow

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and operation method of substrate pr...
- Patent number 11,043,399
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Tomiyasu Maezono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and liquid mixing method
- Patent number 10,067,514
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate liquid processing apparatus and method, and computer-read...
- Patent number 9,862,007
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Daisuke Saiki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD OF SUBSTRATE PR...
- Publication number 20200211867
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Tomiyasu Maezono
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READ...
- Publication number 20150273538
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Daisuke Saiki
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD
- Publication number 20150146498
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL