Tomoaki AIHARA

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,996,302
- Issue date May 28, 2024
- SCREEN Holdings Co., Ltd.
- Tomoaki Aihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,670,523
- Issue date Jun 6, 2023
- SCREEN Holdings Co., Ltd.
- Takashi Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 8,640,359
- Issue date Feb 4, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Tomoaki Aihara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate treating apparatus
- Patent number 8,178,821
- Issue date May 15, 2012
- Dainippon Screen Mfg. Co., Ltd.
- Tomoaki Aihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 7,506,457
- Issue date Mar 24, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Tomoaki Aihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230307264
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Takashi OTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220310416
- Publication date Sep 29, 2022
- SCREEN Holdings Co., Ltd.
- Rikuta AOKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220301894
- Publication date Sep 22, 2022
- SCREEN Holdings Co., Ltd.
- Tomoaki AIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180337068
- Publication date Nov 22, 2018
- SCREEN Holdings Co., Ltd.
- Takashi OTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20140109430
- Publication date Apr 24, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Tomoaki AIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20090158613
- Publication date Jun 25, 2009
- Tomoaki AIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20070295375
- Publication date Dec 27, 2007
- Tomoaki AIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20070113744
- Publication date May 24, 2007
- Tomoaki AIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20070045161
- Publication date Mar 1, 2007
- Tomoaki AIHARA
- H01 - BASIC ELECTRIC ELEMENTS

Tomoaki AIHARA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate treating apparatus and substrate treating method

Substrate treating apparatus

Substrate treating apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS