TOMOAKI FUJIMOTO

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and cleaning method of substrate
- Patent number 12,100,587
- Issue date Sep 24, 2024
- Ebara Corporation
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and polishing apparatus
- Patent number 11,948,811
- Issue date Apr 2, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING
Information Patent Grant
Cleaning member mounting mechanism and substrate cleaning apparatus
- Patent number 11,894,244
- Issue date Feb 6, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING
Information Patent Grant
Roller shaft for substrate cleaning
- Patent number D992845
- Issue date Jul 18, 2023
- Ebara Corporation
- Tomoaki Fujimoto
- D32 - Washing, cleaning, or drying machine
Information Patent Grant
Jig for attaching and detaching cleaning member
- Patent number 11,524,322
- Issue date Dec 13, 2022
- Ebara Corporation
- Tomoaki Fujimoto
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER DETECTION DEVICE AND DROPLET GUIDE MEMBER
- Publication number 20240213061
- Publication date Jun 27, 2024
- EBARA CORPORATION
- TOMOAKI FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20240194498
- Publication date Jun 13, 2024
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING
Information Patent Application
CLEANING MEMBER MOUNTING MECHANISM AND SUBSTRATE CLEANING APPARATUS
- Publication number 20210384048
- Publication date Dec 9, 2021
- EBARA CORPORATION
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20210202273
- Publication date Jul 1, 2021
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE
- Publication number 20210111018
- Publication date Apr 15, 2021
- EBARA CORPORATION
- Fumitoshi OIKAWA
- B08 - CLEANING
Information Patent Application
JIG FOR ATTACHING AND DETACHING CLEANING MEMBER
- Publication number 20200391258
- Publication date Dec 17, 2020
- EBARA CORPORATION
- TOMOAKI FUJIMOTO
- B08 - CLEANING