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Tomoaki KOHZU
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Electrostatic chuck with porous plug
Patent number
12,162,111
Issue date
Dec 10, 2024
Applied Materials, Inc.
Arvinder Chadha
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck with porous plug
Patent number
11,794,296
Issue date
Oct 24, 2023
Applied Materials, Inc.
Arvinder Chadha
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOG...
Publication number
20250112075
Publication date
Apr 3, 2025
Applied Materials, Inc.
Alexander SULYMAN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Electrostatic Chuck Having Multi Zone Gas Cooling
Publication number
20250096703
Publication date
Mar 20, 2025
Applied Materials, Inc.
Sajad YAZDANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
ELECTROSTATIC CHUCK WITH POROUS PLUG
Publication number
20240051075
Publication date
Feb 15, 2024
Applied Materials, Inc.
Arvinder CHADHA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC CHUCK WITH POROUS PLUG
Publication number
20230241731
Publication date
Aug 3, 2023
Applied Materials, Inc.
Arvinder CHADHA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR