Tomoaki Koyama

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Nagano-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and substrate temperature adjusting-fixing device
- Patent number 8,199,454
- Issue date Jun 12, 2012
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate temperature control fixing apparatus
- Patent number 8,068,326
- Issue date Nov 29, 2011
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS
- Publication number 20090310274
- Publication date Dec 17, 2009
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE
- Publication number 20090168291
- Publication date Jul 2, 2009
- Shinko Electric Industries Co., Ltd.
- Tomoaki Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICES
- Publication number 20090159590
- Publication date Jun 25, 2009
- Shinko Electric Industries Co., Ltd.
- Hiroshi Yonekura
- H01 - BASIC ELECTRIC ELEMENTS