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Tomoaki Nishimura
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Shiga, JP
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last 30 patents
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Patent Grant
Metallic compound thin film that contains high-k dielectric metal,...
Patent number
7,772,678
Issue date
Aug 10, 2010
Rohm Co., Ltd.
Kunihiko Iwamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a metal oxynitride thin film that includes a...
Patent number
7,482,234
Issue date
Jan 27, 2009
Rohm Co., Ltd.
Kunihiko Iwamoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF FABRICATING A METAL OXYNITRIDE THIN FILM THAT INCLUDES A...
Publication number
20090096067
Publication date
Apr 16, 2009
Rohm Co., Ltd.
Kunihiko IWAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metallic compound thin film and method of fabricating the same, sem...
Publication number
20050116306
Publication date
Jun 2, 2005
Kunihiko Iwamoto
H01 - BASIC ELECTRIC ELEMENTS