Tomoaki OGIWARA

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,622,205
- Issue date Apr 14, 2020
- Tokyo Electron Limited
- Hiroyuki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20190181015
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Tomoaki OGIWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170294319
- Publication date Oct 12, 2017
- TOKYO ELECTRON LIMITED
- Tomoaki OGIWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160236244
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Hiroyuki TAKAHASHI
- B08 - CLEANING