Tomoaki OGIWARA

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Gyeonggi-do, KR

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Patents Grantslast 30 patents

Information Patent Grant
Etching method, and recording medium
- Patent number 9,466,507
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Shigeki Tozawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Etching Method, and Recording Medium
- Publication number 20160163562
- Publication date Jun 9, 2016
- TOKYO ELECTRON LIMITED
- Shigeki TOZAWA
- H01 - BASIC ELECTRIC ELEMENTS