Tomoaki Ojima

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 12,070,769
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Chikara Nobukuni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 11,691,172
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Chikara Nobukuni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate liquid processing apparatus, and control method of heater...
- Patent number 10,422,551
- Issue date Sep 24, 2019
- Tokyo Electron Limited
- Hisakazu Nakayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20230234091
- Publication date Jul 27, 2023
- TOKYO ELECTRON LIMITED
- Chikara NOBUKUNI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20210001370
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Chikara NOBUKUNI
- H01 - BASIC ELECTRIC ELEMENTS