Tomoaki Ukei

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and method
- Patent number 8,262,848
- Issue date Sep 11, 2012
- Tokyo Electron Limited
- Masahide Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method
- Patent number 7,846,293
- Issue date Dec 7, 2010
- Tokyo Electron Limited
- Masahide Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 7,713,431
- Issue date May 11, 2010
- Tokyo Electron Limited
- Tomoaki Ukei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20110068087
- Publication date Mar 24, 2011
- Masahide Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and method, and plasma control unit
- Publication number 20050279457
- Publication date Dec 22, 2005
- TOKYO ELECTRON LIMITED
- Tatsuo Matsudo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus and method
- Publication number 20050274321
- Publication date Dec 15, 2005
- TOKYO ELECTRON LIMITED
- Tomoaki Ukei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus and method
- Publication number 20050224337
- Publication date Oct 13, 2005
- Masahide Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS