Tomoatsu Ishibashi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
- Patent number 12,033,847
- Issue date Jul 9, 2024
- Ebara Corporation
- Toshio Mizuno
- B24 - GRINDING POLISHING
Information Patent Grant
Washing device and washing method
- Patent number 11,837,477
- Issue date Dec 5, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 11,817,311
- Issue date Nov 14, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, substrate...
- Patent number 11,676,827
- Issue date Jun 13, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,660,643
- Issue date May 30, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Roll-type processing member, pencil-type processing member, and sub...
- Patent number 11,642,704
- Issue date May 9, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover for swing member of substrate processing apparatus, swing mem...
- Patent number 11,626,299
- Issue date Apr 11, 2023
- Ebara Corporation
- Yoshitaka Kitagawa
- B08 - CLEANING
Information Patent Grant
Jig for attaching and detaching cleaning member
- Patent number 11,524,322
- Issue date Dec 13, 2022
- Ebara Corporation
- Tomoaki Fujimoto
- B08 - CLEANING
Information Patent Grant
Substrate cleaning member and substrate cleaning apparatus
- Patent number 11,501,983
- Issue date Nov 15, 2022
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning tool, substrate cleaning apparatus, substrate pr...
- Patent number 11,424,138
- Issue date Aug 23, 2022
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Storage container of scrubbing member and package of same
- Patent number 11,180,303
- Issue date Nov 23, 2021
- Ebara Corporation
- Hisajiro Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing device and washing method
- Patent number 11,164,758
- Issue date Nov 2, 2021
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage container of scrubbing member and package of same
- Patent number 11,142,386
- Issue date Oct 12, 2021
- Ebara Corporation
- Hisajiro Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning substrate and substrate cleaning method
- Patent number 11,094,548
- Issue date Aug 17, 2021
- Ebara Corporation
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,081,373
- Issue date Aug 3, 2021
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Substrate washing device
- Patent number 10,991,602
- Issue date Apr 27, 2021
- Ebara Corporation
- Koichi Fukaya
- B08 - CLEANING
Information Patent Grant
Substrate cleaning roll, substrate cleaning apparatus, and substrat...
- Patent number 10,892,173
- Issue date Jan 12, 2021
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus
- Patent number 10,737,301
- Issue date Aug 11, 2020
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Cleaning device, method of manufacturing the same and substrate cle...
- Patent number 10,625,308
- Issue date Apr 21, 2020
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Roll-type processing member, pencil-type processing member, and sub...
- Patent number 10,471,481
- Issue date Nov 12, 2019
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device and roll cleaning member
- Patent number 10,453,708
- Issue date Oct 22, 2019
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Substrate drying apparatus, storage medium, and substrate drying me...
- Patent number 10,395,949
- Issue date Aug 27, 2019
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning member and substrate cleaning apparatus
- Patent number 10,315,232
- Issue date Jun 11, 2019
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 10,192,757
- Issue date Jan 29, 2019
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing device and washing method
- Patent number 10,170,344
- Issue date Jan 1, 2019
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 10,163,664
- Issue date Dec 25, 2018
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus comprising a second jet nozzle surroun...
- Patent number 10,090,189
- Issue date Oct 2, 2018
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sponge for substrate cleaning
- Patent number D822926
- Issue date Jul 10, 2018
- Ebara Corporation
- Tomoatsu Ishibashi
- D32 - Washing, cleaning, or drying machine
Information Patent Grant
Substrate drying apparatus, substrate drying method and control pro...
- Patent number 10,008,380
- Issue date Jun 26, 2018
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus
- Patent number 10,002,778
- Issue date Jun 19, 2018
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20240213045
- Publication date Jun 27, 2024
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING DEVICE AND SUBSTRATE DRYING METHOD
- Publication number 20230005762
- Publication date Jan 5, 2023
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, POLISHING APPARATUS, BUFFING APPARATU...
- Publication number 20220410343
- Publication date Dec 29, 2022
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
CLEANING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING CLEANING...
- Publication number 20220013352
- Publication date Jan 13, 2022
- Toshio Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WASHING DEVICE AND WASHING METHOD
- Publication number 20210272820
- Publication date Sep 2, 2021
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210242015
- Publication date Aug 5, 2021
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE CONTAINER OF SCRUBBING MEMBER AND PACKAGE OF SAME
- Publication number 20210163208
- Publication date Jun 3, 2021
- EBARA CORPORATION
- Hisajiro Nakano
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20210129194
- Publication date May 6, 2021
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER FOR SWING MEMBER OF SUBSTRATE PROCESSING APPARATUS, SWING MEM...
- Publication number 20200402820
- Publication date Dec 24, 2020
- EBARA CORPORATION
- Yoshitaka KITAGAWA
- B08 - CLEANING
Information Patent Application
JIG FOR ATTACHING AND DETACHING CLEANING MEMBER
- Publication number 20200391258
- Publication date Dec 17, 2020
- EBARA CORPORATION
- TOMOAKI FUJIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20200258737
- Publication date Aug 13, 2020
- EBARA CORPORATION
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING MEMBER AND SUBSTRATE CLEANING APPARATUS
- Publication number 20200118843
- Publication date Apr 16, 2020
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING TOOL, SUBSTRATE CLEANING APPARATUS, SUBSTRATE PR...
- Publication number 20200066549
- Publication date Feb 27, 2020
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
ROLL-TYPE PROCESSING MEMBER, PENCIL-TYPE PROCESSING MEMBER, AND SUB...
- Publication number 20200030855
- Publication date Jan 30, 2020
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20190164769
- Publication date May 30, 2019
- EBARA CORPORATION
- Shinji KAJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD, SUBSTRATE PRO...
- Publication number 20190088510
- Publication date Mar 21, 2019
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
WASHING DEVICE AND WASHING METHOD
- Publication number 20190080933
- Publication date Mar 14, 2019
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING MEMBER AND SUBSTRATE CLEANING APPARATUS
- Publication number 20180126422
- Publication date May 10, 2018
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20180068877
- Publication date Mar 8, 2018
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE WASHING DEVICE
- Publication number 20170323809
- Publication date Nov 9, 2017
- EBARA CORPORATION
- Koichi FUKAYA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20170316960
- Publication date Nov 2, 2017
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING ROLL, SUBSTRATE CLEANING APPARATUS, AND SUBSTRAT...
- Publication number 20170316959
- Publication date Nov 2, 2017
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
CLEANING DEVICE, METHOD OF MANUFACTURING THE SAME AND SUBSTRATE CLE...
- Publication number 20170209902
- Publication date Jul 27, 2017
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- A46 - BRUSHWARE
Information Patent Application
CLEANING DEVICE AND ROLL CLEANING MEMBER
- Publication number 20170170034
- Publication date Jun 15, 2017
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
CLEANING DEVICE, METHOD OF MANUFACTURING THE SAME AND SUBSTRATE CLE...
- Publication number 20160144410
- Publication date May 26, 2016
- EBARA CORPORATION
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Application
ROLL-TYPE PROCESSING MEMBER, PENCIL-TYPE PROCESSING MEMBER, AND SUB...
- Publication number 20160126113
- Publication date May 5, 2016
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS
- Publication number 20160052104
- Publication date Feb 25, 2016
- EBARA CORPORATION
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS
- Publication number 20150352600
- Publication date Dec 10, 2015
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD
- Publication number 20150348806
- Publication date Dec 3, 2015
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING APPARATUS, STORAGE MEDIUM, AND SUBSTRATE DRYING ME...
- Publication number 20150303078
- Publication date Oct 22, 2015
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS

Tomoatsu Ishibashi

Person

Patents Grantslast 30 patents

Cleaning module, substrate processing apparatus including cleaning...

Washing device and washing method

Substrate cleaning method and substrate cleaning apparatus

Substrate cleaning apparatus, substrate cleaning method, substrate...

Substrate cleaning device and substrate cleaning method

Roll-type processing member, pencil-type processing member, and sub...

Cover for swing member of substrate processing apparatus, swing mem...

Jig for attaching and detaching cleaning member

Substrate cleaning member and substrate cleaning apparatus

Substrate cleaning tool, substrate cleaning apparatus, substrate pr...

Storage container of scrubbing member and package of same

Washing device and washing method

Storage container of scrubbing member and package of same

Apparatus for cleaning substrate and substrate cleaning method

Substrate cleaning apparatus and substrate cleaning method

Substrate washing device

Substrate cleaning roll, substrate cleaning apparatus, and substrat...

Substrate cleaning apparatus

Cleaning device, method of manufacturing the same and substrate cle...

Roll-type processing member, pencil-type processing member, and sub...

Cleaning device and roll cleaning member

Substrate drying apparatus, storage medium, and substrate drying me...

Cleaning member and substrate cleaning apparatus

Substrate cleaning apparatus and substrate cleaning method

Washing device and washing method

Substrate cleaning apparatus and substrate cleaning method

Substrate cleaning apparatus comprising a second jet nozzle surroun...

Sponge for substrate cleaning

Substrate drying apparatus, substrate drying method and control pro...

Substrate cleaning apparatus

Patents Applicationslast 30 patents

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE DRYING DEVICE AND SUBSTRATE DRYING METHOD

SUBSTRATE CLEANING APPARATUS, POLISHING APPARATUS, BUFFING APPARATU...

CLEANING MODULE, SUBSTRATE PROCESSING APPARATUS INCLUDING CLEANING...

WASHING DEVICE AND WASHING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD

STORAGE CONTAINER OF SCRUBBING MEMBER AND PACKAGE OF SAME

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

COVER FOR SWING MEMBER OF SUBSTRATE PROCESSING APPARATUS, SWING MEM...

JIG FOR ATTACHING AND DETACHING CLEANING MEMBER

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE CLEANING MEMBER AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE CLEANING TOOL, SUBSTRATE CLEANING APPARATUS, SUBSTRATE PR...

ROLL-TYPE PROCESSING MEMBER, PENCIL-TYPE PROCESSING MEMBER, AND SUB...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD, SUBSTRATE PRO...

WASHING DEVICE AND WASHING METHOD

CLEANING MEMBER AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE WASHING DEVICE

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING ROLL, SUBSTRATE CLEANING APPARATUS, AND SUBSTRAT...

CLEANING DEVICE, METHOD OF MANUFACTURING THE SAME AND SUBSTRATE CLE...

CLEANING DEVICE AND ROLL CLEANING MEMBER

CLEANING DEVICE, METHOD OF MANUFACTURING THE SAME AND SUBSTRATE CLE...

ROLL-TYPE PROCESSING MEMBER, PENCIL-TYPE PROCESSING MEMBER, AND SUB...

POLISHING APPARATUS

SUBSTRATE CLEANING APPARATUS

CLEANING APPARATUS AND CLEANING METHOD

SUBSTRATE DRYING APPARATUS, STORAGE MEDIUM, AND SUBSTRATE DRYING ME...