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Plasma generating apparatus
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Patent number 5,133,825
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Issue date Jul 28, 1992
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Hi Tachi, Ltd.
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Yoshimi Hakamata
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H01 - BASIC ELECTRIC ELEMENTS
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Ion source device
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Patent number 4,847,476
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Issue date Jul 11, 1989
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Hitachi, Ltd.
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Tadashi Sato
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H01 - BASIC ELECTRIC ELEMENTS
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Ion beam apparatus
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Patent number 4,767,931
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Issue date Aug 30, 1988
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Hitachi, Ltd.
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Tadashi Sato
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H01 - BASIC ELECTRIC ELEMENTS
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Ion source
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Patent number 4,713,585
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Issue date Dec 15, 1987
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Hitachi, Ltd.
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Yasunori Ohno
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H01 - BASIC ELECTRIC ELEMENTS