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Tomofumi Nishiura
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Kawasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device
Patent number
8,357,897
Issue date
Jan 22, 2013
Hitachi High-Technologies Corporation
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for inspecting defect of pattern formed on sem...
Patent number
8,331,651
Issue date
Dec 11, 2012
Hitachi High-Technologies Corporatiopn
Tomofumi Nishiura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for measuring dimension of circuit pattern for...
Patent number
8,283,630
Issue date
Oct 9, 2012
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G01 - MEASURING TESTING
Information
Patent Grant
SEM system and a method for producing a recipe
Patent number
8,073,242
Issue date
Dec 6, 2011
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspecting defect of pattern formed on sem...
Patent number
8,045,789
Issue date
Oct 25, 2011
Hitachi High-Technologies Corporaiton
Tomofumi Nishiura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for measuring dimension of circuit pattern for...
Patent number
7,888,638
Issue date
Feb 15, 2011
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20120104254
Publication date
May 3, 2012
Chie Shishido
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus For Inspecting Defect Of Pattern Formed On Sem...
Publication number
20120002861
Publication date
Jan 5, 2012
Tomofumi NISHIURA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and Apparatus For Measuring Dimension Of Circuit Pattern For...
Publication number
20110127429
Publication date
Jun 2, 2011
Atsushi Miyamoto
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Measuring Dimension of Circuit Patterm For...
Publication number
20090242760
Publication date
Oct 1, 2009
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTING DEFECT OF PATTERN FORMED ON SEM...
Publication number
20090208090
Publication date
Aug 20, 2009
Tomofumi NISHIURA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEM SYSTEM AND A METHOD FOR PRODUCING A RECIPE FOR IMAGING OR MEASU...
Publication number
20080159609
Publication date
Jul 3, 2008
Atsushi Miyamoto
G06 - COMPUTING CALCULATING COUNTING