Tomoharu Hase

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposing method, exposing apparatus and device manufacturing method...
- Patent number 7,251,014
- Issue date Jul 31, 2007
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system and exposure apparatus
- Patent number 7,236,239
- Issue date Jun 26, 2007
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of cleaning optical element of the same
- Patent number 7,119,878
- Issue date Oct 10, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,116,397
- Issue date Oct 3, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of cleaning optical element of the same
- Patent number 7,061,576
- Issue date Jun 13, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and device manufacturing method including gas pu...
- Patent number 6,999,159
- Issue date Feb 14, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method including gas pu...
- Patent number 6,967,706
- Issue date Nov 22, 2005
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method including gas pu...
- Patent number 6,853,439
- Issue date Feb 8, 2005
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method including gas pu...
- Patent number 6,630,985
- Issue date Oct 7, 2003
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,552,774
- Issue date Apr 22, 2003
- Canon Kabushiki Kaisha
- Tomoharu Hase
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure apparatus and method of cleaning optical element of the same
- Patent number 6,252,648
- Issue date Jun 26, 2001
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
IMMERSION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090185150
- Publication date Jul 23, 2009
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060077362
- Publication date Apr 13, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method of cleaning optical element of the same
- Publication number 20060001853
- Publication date Jan 5, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS
Information Patent Application
Exposure apparatus and device manufacturing method including gas pu...
- Publication number 20050231697
- Publication date Oct 20, 2005
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposing method, exposing apparatus and device manufacturing method...
- Publication number 20050122492
- Publication date Jun 9, 2005
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system and exposure apparatus
- Publication number 20050117137
- Publication date Jun 2, 2005
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method including gas pu...
- Publication number 20050030499
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20020149753
- Publication date Oct 17, 2002
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20010030739
- Publication date Oct 18, 2001
- Tomoharu Hase
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Exposure apparatus and method of cleaning optical element of the same
- Publication number 20010028447
- Publication date Oct 11, 2001
- Tomoharu Hase
- G02 - OPTICS

Tomoharu Hase

Person

Patents Grantslast 30 patents

Exposing method, exposing apparatus and device manufacturing method...

Illumination system and exposure apparatus

Exposure apparatus and method of cleaning optical element of the same

Exposure apparatus and device manufacturing method

Exposure apparatus and method of cleaning optical element of the same

Exposure apparatus and device manufacturing method including gas pu...

Exposure apparatus and device manufacturing method including gas pu...

Exposure apparatus and device manufacturing method including gas pu...

Exposure apparatus and device manufacturing method including gas pu...

Exposure apparatus

Exposure apparatus and method of cleaning optical element of the same

Patents Applicationslast 30 patents

IMMERSION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Exposure apparatus and device manufacturing method

Exposure apparatus and method of cleaning optical element of the same

Exposure apparatus and device manufacturing method including gas pu...

Exposing method, exposing apparatus and device manufacturing method...

Illumination system and exposure apparatus

Exposure apparatus and device manufacturing method including gas pu...

Exposure apparatus and device manufacturing method

Exposure apparatus

Exposure apparatus and method of cleaning optical element of the same