Tomoharu Katagiri

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Chiyoda-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for making metal interconnection
- Patent number 6,063,703
- Issue date May 16, 2000
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal interconnection and method for making
- Patent number 5,973,402
- Issue date Oct 26, 1999
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a multilevel interconnection structure
- Patent number 5,952,723
- Issue date Sep 14, 1999
- Kawasaki Steel Corporation
- Nobuyuki Takeyasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device having multilevel inte...
- Patent number 5,637,534
- Issue date Jun 10, 1997
- Kawasaki Steel Corporation
- Nobuyuki Takeyasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making metal interconnection with chlorine plasma etch
- Patent number 5,627,102
- Issue date May 6, 1997
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming interlayer-insulating film using ozone and organi...
- Patent number 5,290,736
- Issue date Mar 1, 1994
- Kawasaki Steel Corporation
- Nobuyoshi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...