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TOMOHARU MATSUSHITA
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Narita-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate position calibration for substrate supports in substrate...
Patent number
11,201,078
Issue date
Dec 14, 2021
Applied Materials, Inc.
Tomoharu Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Physical vapor deposition (PVD) electrostatic chuck with improved t...
Patent number
11,031,273
Issue date
Jun 8, 2021
Applied Materials, Inc.
Bonnie T Chia
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Substrate support with improved RF return
Patent number
10,134,615
Issue date
Nov 20, 2018
Applied Materials, Inc.
Aravind Miyar Kamath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support with multiple heating zones
Patent number
9,888,528
Issue date
Feb 6, 2018
Applied Materials, Inc.
Tomoharu Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
POCKET HEATER WITH PURGE TO IMPROVE GAP TOLERANCE
Publication number
20230265561
Publication date
Aug 24, 2023
Applied Materials, Inc.
Zubin HUANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...
Publication number
20220099426
Publication date
Mar 31, 2022
Tomoharu MATSUSHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) ELECTROSTATIC CHUCK WITH IMPROVED...
Publication number
20200185247
Publication date
Jun 11, 2020
Applied Materials, Inc.
BONNIE T CHIA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...
Publication number
20180233396
Publication date
Aug 16, 2018
TOMOHARU MATSUSHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT WITH IMPROVED RF RETURN
Publication number
20160240426
Publication date
Aug 18, 2016
Applied Materials, Inc.
ARAVIND MIYAR KAMATH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT WITH MULTIPLE HEATING ZONES
Publication number
20160192444
Publication date
Jun 30, 2016
Applied Materials, Inc.
TOMOHARU MATSUSHITA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE SUPPORT WITH MORE UNIFORM EDGE PURGE
Publication number
20160002778
Publication date
Jan 7, 2016
Applied Materials, Inc.
JALLEPALLY RAVI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...