Tomoharu Shimada

Person

Nagasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus and method of manufacturing substrates
- Patent number 8,963,051
- Issue date Feb 24, 2015
- Hitachi Kokusai Electric Inc.
- Tomoharu Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal treatment apparatus, method for manufacturing semiconductor...
- Patent number 7,667,301
- Issue date Feb 23, 2010
- Hitachi Kokusai Electric Inc.
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for fabricating a semiconductor device
- Patent number 7,077,913
- Issue date Jul 18, 2006
- Hitachi Kokusai Electric, Inc.
- Tomoharu Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Thermal treatment apparatus, method for manufacturing semiconductor...
- Publication number 20100148415
- Publication date Jun 17, 2010
- Hitachi Kokusai Electric Inc.
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal treatment apparatus, method for manufacturing semiconductor...
- Publication number 20090186489
- Publication date Jul 23, 2009
- Hitachi Kokusai Electric Inc.
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Treatment Apparatus and Method of Manufacturing Substrates
- Publication number 20080190910
- Publication date Aug 14, 2008
- Hitachi Kokusai Electric Inc.
- Tomoharu Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Treatment Apparatus
- Publication number 20070275570
- Publication date Nov 29, 2007
- Hitachi Kokusai Electric Inc.
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal Treatment Apparatus, Method For Manufacturing Semiconductor...
- Publication number 20070194411
- Publication date Aug 23, 2007
- Hitachi Kokusai Electric Inc.
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fabricating a semiconductor device
- Publication number 20030221623
- Publication date Dec 4, 2003
- Hitachi Kokusai Electric Inc.
- Nobuhito Shima
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat treatment apparatus and a method for fabricating substrates
- Publication number 20030170583
- Publication date Sep 11, 2003
- HITACHI KOKUSAI ELECTRIC INC.
- Sadao Nakashima
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus for fabricating a semiconductor device
- Publication number 20030150386
- Publication date Aug 14, 2003
- Hitachi Kokusai Electric, Inc.
- Tomoharu Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tomoharu Shimada

Person

Patents Grantslast 30 patents

Heat treatment apparatus and method of manufacturing substrates

Thermal treatment apparatus, method for manufacturing semiconductor...

Apparatus for fabricating a semiconductor device

Patents Applicationslast 30 patents

Thermal treatment apparatus, method for manufacturing semiconductor...

Thermal treatment apparatus, method for manufacturing semiconductor...

Heat Treatment Apparatus and Method of Manufacturing Substrates

Heat Treatment Apparatus

Thermal Treatment Apparatus, Method For Manufacturing Semiconductor...

Fabricating a semiconductor device

Heat treatment apparatus and a method for fabricating substrates

Apparatus for fabricating a semiconductor device