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Tomoharu Takahashi
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Resist composition and resist pattern forming method
Patent number
8,399,173
Issue date
Mar 19, 2013
Tokyo Ohka Kogyo Co., Ltd.
Shoichi Fujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD
Publication number
20090258313
Publication date
Oct 15, 2009
TOKYO OHKA KOGYO., LTD.
Shoichi Fujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY