Tomohide Minami

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature measurement sensor, temperature measurement system, and...
- Patent number 11,841,278
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Tong Wu
- G01 - MEASURING TESTING
Information Patent Grant
Antenna device and temperature detection method
- Patent number 11,460,355
- Issue date Oct 4, 2022
- Tokyo Electron Limited
- Tong Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for real-time sensing of properties in industr...
- Patent number 11,114,321
- Issue date Sep 7, 2021
- Tokyo Electron Limited
- Sylvain Ballandras
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method for calibrating measuring device and case used in the calibr...
- Patent number 10,837,810
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic capacitance measuring device
- Patent number 10,837,991
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Grant
Measuring instrument for measuring electrostatic capacity and metho...
- Patent number 10,634,479
- Issue date Apr 28, 2020
- Tokyo Electron Limited
- Kippei Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for acquiring data indicating electrostatic capacitance
- Patent number 10,074,549
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Grant
Sensor chip for electrostatic capacitance measurement and measuring...
- Patent number 10,018,484
- Issue date Jul 10, 2018
- Tokyo Electron Limited
- Kippei Sugita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pressure measuring device and pressure measuring method
- Patent number 9,970,838
- Issue date May 15, 2018
- Tokyo Electron Limited
- Tomohide Minami
- G01 - MEASURING TESTING
Information Patent Grant
Sensor chip for electrostatic capacitance measurement and measuring...
- Patent number 9,903,739
- Issue date Feb 27, 2018
- Tokyo Electron Limited
- Kippei Sugita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System of inspecting focus ring and method of inspecting focus ring
- Patent number 9,841,395
- Issue date Dec 12, 2017
- Tokyo Electron Limited
- Kippei Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure sensor and method for manufacturing the same
- Patent number 9,709,453
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Tomohide Minami
- G01 - MEASURING TESTING
Information Patent Grant
Pressure sensor and method for manufacturing the same
- Patent number 9,702,038
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Tomohide Minami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Position detecting method for performing position alignment of tran...
- Patent number 8,749,257
- Issue date Jun 10, 2014
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Jig for detecting position
- Patent number 8,149,005
- Issue date Apr 3, 2012
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Jig for detecting position
- Patent number 7,994,793
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring device using oscillating frequency signals
- Patent number 7,977,609
- Issue date Jul 12, 2011
- Tokyo Electron Limited
- Nobuyuki Sata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature measuring device and method for measuring wafer-type th...
- Patent number 7,923,665
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Coating film forming method and apparatus
- Patent number 7,510,611
- Issue date Mar 31, 2009
- Tokyo Electron Limited
- Tomohide Minami
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming method and system
- Patent number 7,488,505
- Issue date Feb 10, 2009
- Tokyo Electron Limited
- Tomohide Minami
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Low-pressure dryer and low-pressure drying method
- Patent number 7,024,798
- Issue date Apr 11, 2006
- Toyota Electron Limited
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-pressure dryer and low-pressure drying method
- Patent number 6,986,214
- Issue date Jan 17, 2006
- Tokyo Electron Limited
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming method and apparatus
- Patent number 6,884,294
- Issue date Apr 26, 2005
- Tokyo Electron Limited
- Tomohide Minami
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Low-pressure dryer and low-pressure drying method
- Patent number 6,796,054
- Issue date Sep 28, 2004
- Tokyo Electron Limited
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming method and system
- Patent number 6,776,845
- Issue date Aug 17, 2004
- Tokyo Electron Limited
- Tomohide Minami
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,371,667
- Issue date Apr 16, 2002
- Tokyo Electron Limited
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing solution supply apparatus
- Patent number 6,238,109
- Issue date May 29, 2001
- Tokyo Electron Limited
- Tomohide Minami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR REAL-TIME SENSING OF PROPERTIES IN INDUSTR...
- Publication number 20210343560
- Publication date Nov 4, 2021
- TOKYO ELECTRON LIMITED
- Sylvain Ballandras
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA DEVICE AND TEMPERATURE DETECTION METHOD
- Publication number 20200408612
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Tong WU
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE MEASUREMENT SENSOR, TEMPERATURE MEASUREMENT SYSTEM, AND...
- Publication number 20200408613
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Tong WU
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR REAL-TIME SENSING OF PROPERTIES IN INDUSTR...
- Publication number 20190057887
- Publication date Feb 21, 2019
- TOKYO ELECTRON LIMITED
- Sylvain Ballandras
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CALIBRATING MEASURING DEVICE AND CASE USED IN THE CALIBR...
- Publication number 20190033103
- Publication date Jan 31, 2019
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CAPACITANCE MEASURING DEVICE
- Publication number 20180284171
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- G01 - MEASURING TESTING
Information Patent Application
SENSOR CHIP FOR ELECTROSTATIC CAPACITANCE MEASUREMENT AND MEASURING...
- Publication number 20180136013
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Application
MEASURING INSTRUMENT FOR MEASURING ELECTROSTATIC CAPACITY AND METHO...
- Publication number 20170363407
- Publication date Dec 21, 2017
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ACQUIRING DATA INDICATING ELECTROSTATIC CAPACITANCE
- Publication number 20170278735
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- G01 - MEASURING TESTING
Information Patent Application
SENSOR CHIP FOR ELECTROSTATIC CAPACITANCE MEASUREMENT AND MEASURING...
- Publication number 20160363433
- Publication date Dec 15, 2016
- TOKYO ELECTRON LIMITED
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM OF INSPECTING FOCUS RING AND METHOD OF INSPECTING FOCUS RING
- Publication number 20160363556
- Publication date Dec 15, 2016
- TOKYO ELECTRON LIMITED
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE MEASURING DEVICE AND PRESSURE MEASURING METHOD
- Publication number 20150377732
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Tomohide MINAMI
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20150377735
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Tomohide MINAMI
- G01 - MEASURING TESTING
Information Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20150377812
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Tomohide MINAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POSITION DETECTING METHOD
- Publication number 20120158355
- Publication date Jun 21, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
JIG FOR DETECTING POSITION
- Publication number 20090115422
- Publication date May 7, 2009
- TOKYO ELECTRON LIMITED
- Toshiyuki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer-Shaped Measuring Apparatus and Method for Manufacturing the Same
- Publication number 20090085031
- Publication date Apr 2, 2009
- TOKYO ELECTRON LIMITED
- Kenji Matsuda
- G01 - MEASURING TESTING
Information Patent Application
JIG FOR DETECTING POSTION
- Publication number 20090033908
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
Temperature measuring device, thermal processor having temperature...
- Publication number 20070170170
- Publication date Jul 26, 2007
- Noboyuki Sata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Temperature measuring device and method for measuring wafer-type th...
- Publication number 20070147468
- Publication date Jun 28, 2007
- Toshiyuki Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
Coating film forming method and apparatus
- Publication number 20050170087
- Publication date Aug 4, 2005
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-pressure dryer and low-pressure drying method
- Publication number 20050160619
- Publication date Jul 28, 2005
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating apparatus and coating method
- Publication number 20040261701
- Publication date Dec 30, 2004
- Shinji Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating film forming method and system
- Publication number 20040241320
- Publication date Dec 2, 2004
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-pressure dryer and low-pressure drying method
- Publication number 20040216325
- Publication date Nov 4, 2004
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-pressure dryer and low-pressure drying method
- Publication number 20030172542
- Publication date Sep 18, 2003
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming method and system
- Publication number 20020176928
- Publication date Nov 28, 2002
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming method and apparatus
- Publication number 20020150679
- Publication date Oct 17, 2002
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010033895
- Publication date Oct 25, 2001
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS

Tomohide Minami

Person

Patents Grantslast 30 patents

Temperature measurement sensor, temperature measurement system, and...

Antenna device and temperature detection method

Apparatus and method for real-time sensing of properties in industr...

Method for calibrating measuring device and case used in the calibr...

Electrostatic capacitance measuring device

Measuring instrument for measuring electrostatic capacity and metho...

Method for acquiring data indicating electrostatic capacitance

Sensor chip for electrostatic capacitance measurement and measuring...

Pressure measuring device and pressure measuring method

Sensor chip for electrostatic capacitance measurement and measuring...

System of inspecting focus ring and method of inspecting focus ring

Pressure sensor and method for manufacturing the same

Pressure sensor and method for manufacturing the same

Position detecting method for performing position alignment of tran...

Jig for detecting position

Jig for detecting position

Temperature measuring device using oscillating frequency signals

Temperature measuring device and method for measuring wafer-type th...

Coating film forming method and apparatus

Coating film forming method and system

Low-pressure dryer and low-pressure drying method

Low-pressure dryer and low-pressure drying method

Coating film forming method and apparatus

Low-pressure dryer and low-pressure drying method

Coating film forming method and system

Film forming method and film forming apparatus

Processing solution supply apparatus

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR REAL-TIME SENSING OF PROPERTIES IN INDUSTR...

ANTENNA DEVICE AND TEMPERATURE DETECTION METHOD

TEMPERATURE MEASUREMENT SENSOR, TEMPERATURE MEASUREMENT SYSTEM, AND...

APPARATUS AND METHOD FOR REAL-TIME SENSING OF PROPERTIES IN INDUSTR...

METHOD FOR CALIBRATING MEASURING DEVICE AND CASE USED IN THE CALIBR...

ELECTROSTATIC CAPACITANCE MEASURING DEVICE

SENSOR CHIP FOR ELECTROSTATIC CAPACITANCE MEASUREMENT AND MEASURING...

MEASURING INSTRUMENT FOR MEASURING ELECTROSTATIC CAPACITY AND METHO...

METHOD FOR ACQUIRING DATA INDICATING ELECTROSTATIC CAPACITANCE

SENSOR CHIP FOR ELECTROSTATIC CAPACITANCE MEASUREMENT AND MEASURING...

SYSTEM OF INSPECTING FOCUS RING AND METHOD OF INSPECTING FOCUS RING

PRESSURE MEASURING DEVICE AND PRESSURE MEASURING METHOD

PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

POSITION DETECTING METHOD

JIG FOR DETECTING POSITION

Wafer-Shaped Measuring Apparatus and Method for Manufacturing the Same

JIG FOR DETECTING POSTION

Temperature measuring device, thermal processor having temperature...

Temperature measuring device and method for measuring wafer-type th...

Coating film forming method and apparatus

Low-pressure dryer and low-pressure drying method

Coating apparatus and coating method

Coating film forming method and system

Low-pressure dryer and low-pressure drying method

Low-pressure dryer and low-pressure drying method

Coating film forming method and system

Coating film forming method and apparatus

Film forming method and film forming apparatus