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Tomohide Watanabe
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Kawasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern inspection device and method of inspecting pattern
Patent number
8,358,340
Issue date
Jan 22, 2013
Kabushiki Kaisha Toshiba
Ryoji Yoshikawa
G01 - MEASURING TESTING
Information
Patent Grant
Focusing device, focusing method and a pattern inspecting apparatus
Patent number
7,394,048
Issue date
Jul 1, 2008
Kabushiki Kaisha Toshiba
Hiromu Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern evaluation apparatus and a method of pattern evaluation
Patent number
5,602,645
Issue date
Feb 11, 1997
Kabushiki Kaisha Toshiba
Mitsuo Tabata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern defects inspection system
Patent number
5,379,348
Issue date
Jan 3, 1995
Kabushiki Kaisha Toshiba
Toshiyuki Watanabe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for measuring non-linearity of a pattern edge
Patent number
4,743,768
Issue date
May 10, 1988
Kabushiki Kaisha Toshiba
Tomohide Watanabe
G01 - MEASURING TESTING
Information
Patent Grant
Automatic focusing apparatus for a semiconductor pattern inspection...
Patent number
4,577,095
Issue date
Mar 18, 1986
Tokyo Shibaura Denki Kabushiki Kaisha
Tomohide Watanabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Automatic focusing apparatus
Patent number
4,230,940
Issue date
Oct 28, 1980
Tokyo Shibaura Denki Kabushiki Kaisha
Masana Minami
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
PATTERN INSPECTION DEVICE AND METHOD OF INSPECTING PATTERN
Publication number
20090303323
Publication date
Dec 10, 2009
Ryoji Yoshikawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS AND METHOD FOR INSPECTING A PATTERN AND METHOD FOR MANUFA...
Publication number
20080055606
Publication date
Mar 6, 2008
Kabushiki Kaisha Toshiba
Hiromu Inoue
G01 - MEASURING TESTING
Information
Patent Application
FOCUSING DEVICE, FOCUSING METHOD AND A PATTERN INSPECTING APPARATUS
Publication number
20070200051
Publication date
Aug 30, 2007
Hiromu Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY