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Tomohiko EDURA
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Sendai City, JP
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last 30 patents
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Patent Application
DEPOSITION APPARATUS, DEPOSITION METHOD, ORGANIC EL DISPLAY, AND LI...
Publication number
20140315342
Publication date
Oct 23, 2014
KYUSHU UNIVERISTY, NATIONAL UNIVERSITY CORPORATION
Tomohiko Edura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
Publication number
20120094014
Publication date
Apr 19, 2012
TOKYO ELECTRON LIMITED
Yuji Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION HEAD AND FILM FORMING APPARATUS
Publication number
20120031339
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Yuji Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS, DEPOSITION METHOD, AND STORAGE MEDIUM HAVING...
Publication number
20110183069
Publication date
Jul 28, 2011
TOKYO ELECTRON LIMITED
Hiroyuki Ikuta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND ORGANIC...
Publication number
20090314635
Publication date
Dec 24, 2009
TOKYO ELECTRON LIMITED
Kazuki MOYAMA
H01 - BASIC ELECTRIC ELEMENTS