Tomohiko Muta

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, control method, and computer-readab...
- Patent number 12,094,737
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Masayuki Kajiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pump, pump device, and liquid supply system
- Patent number 10,655,619
- Issue date May 19, 2020
- Tokyo Electron Limited
- Takashi Sasa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD, AND COMPUTER-READAB...
- Publication number 20210020464
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Masayuki KAJIWARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TANK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF USING THE TANK
- Publication number 20200357662
- Publication date Nov 12, 2020
- TOKYO ELECTRON LIMITED
- Tomohiko MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PUMP, PUMP DEVICE, AND LIQUID SUPPLY SYSTEM
- Publication number 20160115952
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Takashi Sasa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...