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Tomohiko NIIZEKI
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method, substrate processing apparatus, and substrate proce...
Patent number
12,112,954
Issue date
Oct 8, 2024
Tokyo Electron Limited
Maju Tomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Learning device, inference device, and learned model
Patent number
11,922,307
Issue date
Mar 5, 2024
PREFERRED NETWORKS, INC.
Kosuke Nakago
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for etching film and plasma processing apparatus
Patent number
11,637,003
Issue date
Apr 25, 2023
Tokyo Electron Limited
Tomohiko Niizeki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250022706
Publication date
Jan 16, 2025
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADJUSTING METHOD AND ADJUSTING DEVICE
Publication number
20240211753
Publication date
Jun 27, 2024
Preferred Networks, Inc.
Kosuke NAKAGO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Low-Temperature Etch
Publication number
20240112919
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230386800
Publication date
Nov 30, 2023
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20230245898
Publication date
Aug 3, 2023
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING FILM AND PLASMA PROCESSING APPARATUS
Publication number
20230215707
Publication date
Jul 6, 2023
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCE...
Publication number
20210233778
Publication date
Jul 29, 2021
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LEARNING DEVICE, INFERENCE DEVICE, AND LEARNED MODEL
Publication number
20210209413
Publication date
Jul 8, 2021
Preferred Networks, Inc.
Kosuke NAKAGO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210202233
Publication date
Jul 1, 2021
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR ETCHING FILM AND PLASMA PROCESSING APPARATUS
Publication number
20210151301
Publication date
May 20, 2021
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200279753
Publication date
Sep 3, 2020
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
H01 - BASIC ELECTRIC ELEMENTS