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Tomohiko Sugita
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Yokkaichi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
Patent number
12,027,380
Issue date
Jul 2, 2024
TOSHIBA MEMORY CORPORATION
Tomohiko Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor substrate, method of manufacturing semiconductor devi...
Patent number
11,616,120
Issue date
Mar 28, 2023
Kioxia Corporation
Fuyuma Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
Patent number
11,610,789
Issue date
Mar 21, 2023
Kioxia Corporation
Katsuhiro Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor storage device and manufacturing method thereof
Patent number
11,145,670
Issue date
Oct 12, 2021
TOSHIBA MEMORY CORPORATION
Yasuhito Yoshimizu
G11 - INFORMATION STORAGE
Information
Patent Grant
Semiconductor processing device
Patent number
10,978,316
Issue date
Apr 13, 2021
TOSHIBA MEMORY CORPORATION
Satoshi Nakaoka
B08 - CLEANING
Information
Patent Grant
Dust collecting apparatus, substrate processing system, and method...
Patent number
10,290,490
Issue date
May 14, 2019
TOSHIBA MEMORY CORPORATION
Tomohiko Sugita
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate treatment apparatus and substrate treatment method
Patent number
10,199,209
Issue date
Feb 5, 2019
TOSHIBA MEMORY CORPORATION
Tomohiko Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device and semiconductor manu...
Patent number
9,514,952
Issue date
Dec 6, 2016
Kabushiki Kaisha Toshiba
Hiroyasu Iimori
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVI...
Publication number
20230207616
Publication date
Jun 29, 2023
Kioxia Corporation
Fuyuma ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND METHO...
Publication number
20220406626
Publication date
Dec 22, 2022
KIOXIA Corporation
Tomohiko SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVI...
Publication number
20220085153
Publication date
Mar 17, 2022
KIOXIA Corporation
Fuyuma ITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
Publication number
20210398825
Publication date
Dec 23, 2021
Toshiba Memory Corporation
Tomohiko SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
Publication number
20210280438
Publication date
Sep 9, 2021
KIOXIA Corporation
Katsuhiro SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20200066751
Publication date
Feb 27, 2020
Toshiba Memory Corporation
Yasuhito Yoshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
Publication number
20190385867
Publication date
Dec 19, 2019
Toshiba Memory Corporation
Tomohiko SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING DEVICE
Publication number
20190259639
Publication date
Aug 22, 2019
Toshiba Memory Corporation
Satoshi NAKAOKA
B08 - CLEANING
Information
Patent Application
DUST COLLECTING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND METHOD...
Publication number
20170250069
Publication date
Aug 31, 2017
KABUSHIKI KAISHA TOSHIBA
Tomohiko SUGITA
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
Publication number
20160365240
Publication date
Dec 15, 2016
KABUSHIKI KAISHA TOSHIBA
Tomohiko SUGITA
B08 - CLEANING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
Publication number
20160071738
Publication date
Mar 10, 2016
KABUSHIKI KAISHA TOSHIBA
Hiroyasu Iimori
H01 - BASIC ELECTRIC ELEMENTS