Tomohiko Takeda

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,767,053
- Issue date Aug 3, 2010
- Hitachi Kokusai Electric Inc.
- Tomohiko Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device, substrate conveying device, and substr...
- Patent number 6,742,977
- Issue date Jun 1, 2004
- Kokusai Electric Co., Ltd.
- Satohiro Okayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20080075640
- Publication date Mar 27, 2008
- Hitachi Kokusai Electric Inc.
- Tomohiko Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and sustrate processing method
- Publication number 20060252283
- Publication date Nov 9, 2006
- HITACHI KOKUSAI ELECTRIC INC.
- Tomohiko Takeda
- H01 - BASIC ELECTRIC ELEMENTS