Tomohiko TAKEUCHI

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Head height adjustment device and substrate processing apparatus pr...
- Patent number 10,556,314
- Issue date Feb 11, 2020
- Ebara Corporation
- Suguru Sakugawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PR...
- Publication number 20180001438
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Suguru SAKUGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170352573
- Publication date Dec 7, 2017
- EBARA CORPORATION
- Zhongxin WEN
- H01 - BASIC ELECTRIC ELEMENTS