Tomohiko Yoshida

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Flattening apparatus, article manufacturing method, flattening meth...
- Patent number 11,915,948
- Issue date Feb 27, 2024
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device manufacturing apparatus and device manufacturing method
- Patent number 9,256,231
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Device manufacturing apparatus, including coolant temperature contr...
- Patent number 8,638,416
- Issue date Jan 28, 2014
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Temperature regulating apparatus, exposure system, and device manuf...
- Patent number 8,131,404
- Issue date Mar 6, 2012
- Canon Kabushiki Kaisha
- Yoshiyuki Okada
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
FLATTENING APPARATUS, ARTICLE MANUFACTURING METHOD, FLATTENING METH...
- Publication number 20210090915
- Publication date Mar 25, 2021
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE MANUFACTURING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110059621
- Publication date Mar 10, 2011
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- G05 - CONTROLLING REGULATING
Information Patent Application
DEVICE MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20100273114
- Publication date Oct 28, 2010
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- G05 - CONTROLLING REGULATING
Information Patent Application
LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...
- Publication number 20100099050
- Publication date Apr 22, 2010
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUF...
- Publication number 20100004796
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Yoshiyuki Okada
- G05 - CONTROLLING REGULATING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20090225290
- Publication date Sep 10, 2009
- Canon Kabushiki Kaisha
- Shinichi Shima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20090153812
- Publication date Jun 18, 2009
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090040482
- Publication date Feb 12, 2009
- Canon Kabushiki Kaisha
- Tomohiko Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tomohiko Yoshida

Person

Patents Grantslast 30 patents

Flattening apparatus, article manufacturing method, flattening meth...

Device manufacturing apparatus and device manufacturing method

Device manufacturing apparatus, including coolant temperature contr...

Temperature regulating apparatus, exposure system, and device manuf...

Patents Applicationslast 30 patents

FLATTENING APPARATUS, ARTICLE MANUFACTURING METHOD, FLATTENING METH...

DEVICE MANUFACTURING APPARATUS AND DEVICE MANUFACTURING METHOD

DEVICE MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING DEVICE

LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...

TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUF...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD