Tomohiro Aizawa

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Yokohama-city, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing method for removing corner material from a semi-conductor...
- Patent number 6,638,147
- Issue date Oct 28, 2003
- SPEEDFAM Co., Ltd.
- Masami Shiino
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Polishing method for removing corner material from a semi-conductor...
- Publication number 20020182985
- Publication date Dec 5, 2002
- SPEEDFAM Co., Ltd.
- Masami Shiino
- B24 - GRINDING POLISHING