TREA

Tomohiro ARAKAWA

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  • Sagamihara-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma treatment device having matching box
    • Patent number 12,131,885
    • Issue date Oct 29, 2024
    • ASM IP Holding B.V.
    • Tomohiro Arakawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing method
    • Patent number 10,622,191
    • Issue date Apr 14, 2020
    • ASM IP Holding B.V.
    • Koji Tanaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS INCLUDING IMPEDANCE ADJUSTER
    • Publication number 20230068101
    • Publication date Mar 2, 2023
    • ASM IP HOLDING B.V.
    • Tomohiro Arakawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA TREATMENT DEVICE HAVING MATCHING BOX
    • Publication number 20220199367
    • Publication date Jun 23, 2022
    • ASM IP HOLDING B.V.
    • Tomohiro Arakawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20190252155
    • Publication date Aug 15, 2019
    • ASM IP HOLDING B.V.
    • Koji TANAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...