Tomohiro GOTO

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,687,886
- Issue date Jun 27, 2017
- SCREEN Holdings Co., Ltd.
- Tomohiro Goto
- B08 - CLEANING
Information Patent Grant
Coating method and coating apparatus
- Patent number 9,553,007
- Issue date Jan 24, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,508,573
- Issue date Nov 29, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahito Kashiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method and coating apparatus
- Patent number 9,343,339
- Issue date May 17, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,059,221
- Issue date Jun 16, 2015
- SCREEN Holdings Co., Ltd.
- Tomohiro Goto
- F26 - DRYING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150217335
- Publication date Aug 6, 2015
- SCREEN Holdings Co., Ltd.
- Tomohiro GOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHOD
- Publication number 20140261571
- Publication date Sep 18, 2014
- SOKUDO CO., LTD.
- Tomohiro GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD AND COATING APPARATUS
- Publication number 20130089664
- Publication date Apr 11, 2013
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD AND COATING APPARATUS
- Publication number 20130089668
- Publication date Apr 11, 2013
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130084393
- Publication date Apr 4, 2013
- Masahito KASHIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20080053487
- Publication date Mar 6, 2008
- Tomohiro Goto
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20080008973
- Publication date Jan 10, 2008
- Tomohiro Goto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20070267047
- Publication date Nov 22, 2007
- Shimpei Hori
- B08 - CLEANING
Information Patent Application
ANTIREFLECTION FILM FORMING METHOD, AND SUBSTRATE TREATING APPARATUS
- Publication number 20070183051
- Publication date Aug 9, 2007
- Osamu Tamada
- G02 - OPTICS

Tomohiro GOTO

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Coating method and coating apparatus

Substrate processing apparatus and substrate processing method

Coating method and coating apparatus

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHOD

COATING METHOD AND COATING APPARATUS

COATING METHOD AND COATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ANTIREFLECTION FILM FORMING METHOD, AND SUBSTRATE TREATING APPARATUS