TREA

Tomohiro HARA

Follow

Person

  • Handa-City, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer support table and RF rod
    • Patent number 12,170,190
    • Issue date Dec 17, 2024
    • NGK Insulators, Ltd.
    • Yutaka Unno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20250210324
    • Publication date Jun 26, 2025
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20250176074
    • Publication date May 29, 2025
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20250159764
    • Publication date May 15, 2025
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    WAFER SUPPORT TABLE AND RF ROD
    • Publication number 20250079235
    • Publication date Mar 6, 2025
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240242943
    • Publication date Jul 18, 2024
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK HEATER AND FILM DEPOSITION APPARATUS
    • Publication number 20240203779
    • Publication date Jun 20, 2024
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER SUPPORT TABLE AND RF ROD
    • Publication number 20230058637
    • Publication date Feb 23, 2023
    • NGK Insulators, Ltd.
    • Yutaka UNNO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20220174788
    • Publication date Jun 2, 2022
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20220112599
    • Publication date Apr 14, 2022
    • NGK Insulators, Ltd.
    • Tomohiro HARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...