Tomohiro HARA

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Handa-City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer support table and RF rod
- Patent number 12,170,190
- Issue date Dec 17, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20240242943
- Publication date Jul 18, 2024
- NGK Insulators, Ltd.
- Tomohiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HEATER AND FILM DEPOSITION APPARATUS
- Publication number 20240203779
- Publication date Jun 20, 2024
- NGK Insulators, Ltd.
- Tomohiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORT TABLE AND RF ROD
- Publication number 20230058637
- Publication date Feb 23, 2023
- NGK Insulators, Ltd.
- Yutaka UNNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC HEATER
- Publication number 20220174788
- Publication date Jun 2, 2022
- NGK Insulators, Ltd.
- Tomohiro HARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CERAMIC HEATER
- Publication number 20220112599
- Publication date Apr 14, 2022
- NGK Insulators, Ltd.
- Tomohiro HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...